Products of other enterprises
Technical characteristics
- TypeSemiconductor
Description
Novellus is the leader in tungsten chemical vapor deposition technology for plug fill and low-stress composite interconnects. For metal CVD applications we combine our productive multistation sequential deposition architecture with process innovations such as high-pressure nucleation, resistive heating, vacuum wafer clamping and full-coverage deposition, using patented wafer backside exclusion technology.
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Metal CVD Products
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